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ADVANCED SOURCES
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- Excimer Sources
Excimer sources provide narrow band light around
a single wavelength. Lamps operating at
wavelengths of 126, 146, 172, 222, 282, and 308
nm are available.
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U-eLektron Ebeam Sources
The U-eLektron
Ebeam sources provide electron beams with
potentials of 10-50 keV. These units are
compact, self-shielding, and have their own
exposure chamber. Custom built systems are available
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