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EXCIMER SOURCES
 
Excimer sources provide narrow band light around a single wavelength. Lamps operating at wavelengths of 126, 146, 172, 222, 282, and 308 nm are available. USHIO provides a wide variety of products covering basic research tools, standard sources, and integrated systems optimized for your specific production requirements.
  • Wide area sources
  • Spot sources
  • Integrated systems
Feature Benefit
Powerful radiation in ultraviolet and vacuum ultraviolet spectral range Allows photochemical processes that were previously not possible with lamps
Single, narrow band wavelengths Supports selected reactions with specificity not available from broadband sources
Very efficient source of energy at the operating wavelength
Low temperature operation Generates minimal infrared radiation, and allows processing of temperature sensitive substrates
Highly efficient source Converts power into light energy effectively, reducing power requirements and heat load
Instant On/Off Provides precise exposure control without mechanical devices
Requires no warm-up or cool down time
Multiple geometries Radiation can be directed inwards or outwards
Spot and wide area coverage designs are feasible



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