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INDUSTRY SYSTEMS AND APPLICATIONS
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- System Integration Resources
We can provide competent integration of both
excimer and EB sources into systems and
subsystems for advanced processing environments.
- Semiconductor and Electronics
Excimer light sources are being applied or
investigated for use in many process areas of
the semiconductor and electronics industries.
- Medical and Biomedical
The medical and biomedical fields present
emerging applications for both excimer and low
voltage electron beam sources.
- Printing and Curing
The curing of inks and resins with
narrow-banded radiation excimer sources shows
great promise-- especially when
temperature-sensitive materials have to be
treated.
- Chemical and Water Treatments
Excimer VUV light sources enable targeted
photochemistry through the emission of intense,
spectrally selective radiation. In comparison to
broad-band UV sources, which emit in across wide
spectral range, undesirable side-reactions can
be avoided. The radiant power levels of the
excimer UV sources in the specific emitted band
corresponds to that emitted by conventional
lamps of about 1kW.
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