Excimer sources
provide narrow band light around a single wavelength. Lamps
operating at wavelengths of 126, 146, 172, 222, 282, and 308
nm are available.
USHIO provides a wide variety of products covering basic research
tools, standard sources, and integrated systems optimized for
your specific production requirements.
- Concept evaluation tools
- Wide area sources
- Spot sources
- Integrated systems
|
Feature |
 |
Benefit |
|
Powerful radiation in ultraviolet
and vacuum ultraviolet spectral range |
|
Allows photochemical
processes that were previously not possible with lamps |
|
Single, narrow band wavelengths |
|
Supports selected reactions
with specificity not available from broadband sources
Very efficient source of energy at the operating wavelength |
|
Low temperature operation |
|
Generates minimal infrared
radiation, and allows processing of temperature sensitive
substrates |
|
Highly efficient source |
|
Converts power into
light energy effectively, reducing power requirements
and heat load |
|
Instant On/Off |
|
Provides precise exposure
control without mechanical devices
Requires no warm-up or cool down time |
|
Multiple operating positions |
|
Lamp can be operated
in any orientation, providing system design flexibility |
|
Multiple geometries |
|
Radiation can be directed
inwards or outwards
Spot and wide area coverage designs are feasible |
|
|
